MaaxCoatting

Plasma Power Supply

Product Specifications

Items
DC (1Ch) DC (2Ch)
EnerStream 5 EnerStream 10 EnerStream 10H EnerStream 20 EnerStream 20H EnerStream 30 EnerStream 30H EnerStream 60 EnerStream 5D EnerStream 10D
Input 3⌀ 208V/ 220V/ 380V 3⌀ 208V/ 220V/ 380V 3⌀ 208V/ 220V/ 380V 3⌀ 220V/ 380V 3⌀ 220V/ 380V 3⌀ 380V/ 440V 3Φ⌀ 440V 3⌀ 440V 3⌀ 380V 3⌀ 380V
lgnition Voltage 1500V 1500V 1500V 1500V 1500V 1500V 1500V 1500V 1500V 1500V
Output 800V, 6.25A / 400V, 12.5A 800V, 12.5A / 400V, 25A 1000V, 10A / 500V, 20A 800V, 25A/ 400V, 50A 1000V, 20A / 500V, 40A 800V, 37.5A / 400V, 75A 1200V, 25A / 545V, 55A 900V, 66.6A / 400V, 150A 800V, 6.25A / 400V, 12.5A 800V, 12.5A/ 400V, 25A
Output Power DC 5kW DC 10kW DC 10kW DC 20kW DC 20kW DC 30kW DC 30kW DC 60kW DC 5kW + 5kW DC 10kW + 10kW
Arc Energy Less than 0.5mJ/kW Less than 0.2mJ/kW Less than 0.5mJ/kW
Interface RS-232 / RS-485(Option: DeviceNet, ProfiBus)
Size(mm) 133(H) x 483(W) x 605(D) 133(H) x 483(W) x 605(D) 133(H) x 483(W) x 605(D) 133(H) x 483(W) x 605(D) 133(H) x 483(W) x 605(D) 177(H) x 483(W) x 655(D) 177(H) x 483(W) x 655(D) 309(H) x 483(W) x 783(D) 133(H) x 483(W) x 655(D) 133(H) x 483(W) x 655(D)
Weight(kg) 24.5 24.5 24.5 30.5 30.5 38.8 38.8 80 32 32
Cooling Air-Cooled
※ Cable Duct + 129mm ※ Specifications subject to change without notice

Pulsed DC waveform to maximize ionization

  • Benefits
    Rapid increase of current induced by change in reignition voltage : 700V → 1000V
  • Adjustable reignition voltage : 50V ~ 300V

Product Specifications

ItemsReverse Boltage FixedReverse Voltage AdjustableReverse Voltage Fixed
EnerPulse 5EnerPulse 10EnerPulse 10LVEnerPulse 10MEnerPulse 20EnerPulse 15NEnerPulse 20NEnerPulse 30Pulse 20
(ES20 + PG20)
Pulse 30
(ES30 + PG30)
Pulse 40
(2 x ES20 + PG40)
Input
208V/ 220V/ 380V

208V/ 220V/ 380V

380V

380V

220V/ 380V/ 440V

440V

220V/ 440V

208V/ 440V

220V/ 380V

380V/ 440V

220V/ 380V
lgnition Voltage1500V1500V1500V1500V1200V1200V1200V1200V1500V1500V1500V
Output800V, 6.25A / 400V, 12.5A800V, 12.5A / 400V, 25A650V, 15.4A / 300V, 33.A800V, 12.5A/ 400V, 50A650V, 30A / 400V, 50A1000V, 15A / 500V, 40A900V, 22.2A / 500V, 40A900V, 33.3A / 400V, 75A800V, 25A / 400V, 50A800V, 37.5A/ 400V, 75A800V, 50A/ 400V, 100A
Output PowerUnipolar Pulse 5kWUnipolar Pulse 10kWUnipolar Pulse 10kWUnipolar Pulse 10kWUnipolar Pulse 20kWUnipolar Pulse 15kWUnipolar Pulse 20kWUnipolar Pulse 30kWUnipolar Pulse 20kWUnipolar Pulse 30kWUnipolar Pulse 40kW
Output Frequency20 ~ 150 kHz5 ~ 350 kHz20 ~ 100 kHz20 ~ 350 kHz20 ~ 150 kHz40 ~ 100 kHz40 ~ 80 kHz
Reverse TimeDc mode, 1.0us ~ 10usDC mode, 1.0us ~ 5usDC mode, 1.0us ~ 8usDC mode, 1.0us ~ 5us
Arc EnergyLess than 1mJ/kWLess than 0.5mJ/kWLess than 1mJ/kW
InterfaceRS-232 / RS-485(Option: DeviceNet, ProfiBus)
Size(mm)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)133(H) x 483(W) x 605(D)177(H) x 483(W) x 700(D)177(H) x 483(W) x 782(D)221.25(H) x 483(W) x 700(D)309(H) x 483(W) x 782(D)133(H) x 483(W) x 605(D)_PG133(H) x 483(W) x 605(D)_PG133(H) x 483(W) x 605(D)_PG
Weight(kg)29.529.529.529.540425073283232
CoolingAir-Cooled

※ Cable Duct + 129mm
※ Specifications subject to change without notice

Bipolar Pulsed DC Power Supplis for Dual Magnetron Sputtering & PECVD